Negative-ion implantation into thin SiO[sub 2] layer for...

Review of Scientific Instruments 2006 Vol. 77; Iss. 3

Negative-ion implantation into thin SiO[sub 2] layer for defined nanoparticle formation

Tsuji, Hiroshi, Arai, Nobutoshi, Gotoh, Naoyuki, Minotani, Takashi, Ishibashi, Toyoji, Okumine, Tetsuya, Adachi, Kouichiro, Kotaki, Hiroshi, Gotoh, Yasuhito, Ishikawa, Junzo
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Volume:
77
Year:
2006
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2163287
File:
PDF, 583 KB
english, 2006
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