![](/img/cover-not-exists.png)
Negative-ion implantation into thin SiO[sub 2] layer for defined nanoparticle formation
Tsuji, Hiroshi, Arai, Nobutoshi, Gotoh, Naoyuki, Minotani, Takashi, Ishibashi, Toyoji, Okumine, Tetsuya, Adachi, Kouichiro, Kotaki, Hiroshi, Gotoh, Yasuhito, Ishikawa, JunzoVolume:
77
Year:
2006
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2163287
File:
PDF, 583 KB
english, 2006