The use of the electron-beam-induced current mode of the...

Journal of Applied Physics 1979 Vol. 50; Iss. 5

The use of the electron-beam-induced current mode of the SEM for observing emitter/collector pipes in bipolar transistors

Ashburn, P., Bull, C. J., Beale, J. R. A.
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Volume:
50
Year:
1979
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.326341
File:
PDF, 748 KB
english, 1979
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