Nucleation period, surface roughness, and oscillations in...

Nucleation period, surface roughness, and oscillations in mass gain per cycle during W atomic layer deposition on Al[sub 2]O[sub 3]

Wind, R. W., Fabreguette, F. H., Sechrist, Z. A., George, S. M.
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Volume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3103254
File:
PDF, 1.54 MB
english, 2009
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