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[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - Thickness control by ion beam milling in acoustic resonator devices
Mishin, Sergey, Oshmyansky, Yury, Bi, FrankYear:
2010
Language:
english
DOI:
10.1109/freq.2010.5556249
File:
PDF, 855 KB
english, 2010