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Morphological evolution of SiGe films covered with and without native oxide during vacuum thermal annealing
Zhang, Yong, Liao, Linghong, LI, Cheng, Lai, Hongkai, Chen, Songyan, Kang, J. Y.Volume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3010301
File:
PDF, 598 KB
english, 2008