Detection of defects in metal interconnects by the nonbias-optical beam induced current technique
Koyama, Tohru, Sonoda, Kenichiro, Komori, Junko, Mashiko, Yoji, Umeno, MasatakaVolume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371638
File:
PDF, 1.46 MB
english, 1999