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Influence of Ar[sup +] ion bombardment on the chemical states of SrBi[sub 2]Ta[sub 2]O[sub 9] thin films fabricated by metalorganic decomposition
Park, Yoon-Baek, Min, Kyung-youl, Cho, Kwang-Jun, Heo, Sung, Lim, Choul-Ho, Lee, Moon-Keun, Lee, Tae-Kwon, Kim, Ho-Joung, Lee, Soun-Young, Kim, Yil-WookVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1354601
File:
PDF, 398 KB
english, 2001