Material and electrical properties of Hf[sub x]Ru[sub y] and Hf[sub x]Ru[sub y]N[sub z] metals as gate electrodes for p-metal oxide semiconductor field effect transistor devices
Sawkar-Mathur, Monica, Chang, Jane P.Volume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2996111
File:
PDF, 463 KB
english, 2008