Interface recombination velocity of silicon-on-insulator wafers measured by microwave reflectance photoconductivity decay method with electric field
Kuwayama, Toshio, Ichimura, Masaya, Arai, EisukeVolume:
83
Year:
2003
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1597988
File:
PDF, 351 KB
english, 2003