Observation of oxidation-enhanced and oxidation-retarded...

Applied Physics Letters 1983 Vol. 42; Iss. 5

Observation of oxidation-enhanced and oxidation-retarded diffusion of antimony in silicon

Tan, T. Y.
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Volume:
42
Year:
1983
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.93966
File:
PDF, 437 KB
english, 1983
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