Improvement of the cantilever beam technique for stress...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1998 / 3 Vol. 16; Iss. 2

Improvement of the cantilever beam technique for stress measurement during the physical vapor deposition process

Moulard, G.
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Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581053
Date:
March, 1998
File:
PDF, 610 KB
english, 1998
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