Radial 32P ion implantation using a coaxial plasma reactor:...

Review of Scientific Instruments 2004 / 12 Vol. 75; Iss. 12

Radial 32P ion implantation using a coaxial plasma reactor: Activity imaging and numerical integration

Fortin, M. A., Dufresne, V., Paynter, R., Sarkissian, A., Stansfield, B.
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Volume:
75
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1821621
Date:
December, 2004
File:
PDF, 755 KB
english, 2004
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