Evaluation of silicon-on-insulator substrates using photoconductive frequency resolved spectroscopy
Lourenço, M. A., Homewood, K. P., Hemment, P. L. F.Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.355073
File:
PDF, 835 KB
english, 1993