Amorphization and crystallization in high-dose...

Journal of Applied Physics 1997 Vol. 81; Iss. 3

Amorphization and crystallization in high-dose Zn+-implanted silicon

Kalitzova, M., Simov, S., Yankov, R. A., Angelov, Ch., Vitali, G., Rossi, M., Pizzuto, C., Zollo, G., Fauré, J., Killian, L., Bonhomme, P., Voelskow, M.
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Volume:
81
Year:
1997
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363904
File:
PDF, 1.05 MB
english, 1997
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