Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures
Meier, Cedrik, Reuter, Dirk, Riedesel, Christof, Wieck, Andreas D.Volume:
93
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1563032
File:
PDF, 358 KB
english, 2003