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[IEEE 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) - Tampa, FL, USA (2013.06.16-2013.06.21)] 2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) - Effect of initial oxidized layer condition on passivation quality of AlOx films deposited by atomic layer deposition technique at room temperature
Sakai, Chikako, Yamamoto, Shunsuke, Miki, Shohei, Arafune, Koji, Hotta, Yasushi, Yoshida, Haruhiko, Ogura, Atsushi, Satoh, Shin-ichiYear:
2013
Language:
english
DOI:
10.1109/pvsc.2013.6744376
File:
PDF, 304 KB
english, 2013