Characterization of SrBi[sub 2]Ta[sub 2]O[sub 9] ferroelectric thin films deposited at low temperatures by plasma-enhanced metalorganic chemical vapor deposition
Seong, Nak-Jin, Yoon, Soon-Gil, Lee, Seaung-SukVolume:
71
Year:
1997
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.119475
File:
PDF, 263 KB
english, 1997