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[IEEE 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Banff, AB, Canada (25-27 Aug. 2004)] 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Closed Loop Micromanipulators for Optical Metrology
Ngo Phong, L., Lee, J., Ressejac, I., Maszkiewicz, M., Zheng, W., Crisan, S., Le Noc, L., Picard, F., Jerominek, H.Year:
2004
Language:
english
DOI:
10.1109/icmens.2004.1508985
File:
PDF, 239 KB
english, 2004