Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 3
Formation of single-orientation epitaxial islands of TiSi[sub 2] on Si(001) using Sr passivation
Posadas, A., Dargis, R., Choi, M. R., Slepko, A., Demkov, A. A., Kim, J. J., Smith, D. J.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3579598
File:
PDF, 1.09 MB
english, 2011