On the scaling of rf and dc self-bias voltages with pressure in electronegative capacitively coupled plasmas
Agarwal, Ankur, Dorf, Leonid, Rauf, Shahid, Collins, KenVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3676182
File:
PDF, 4.98 MB
english, 2012