On the scaling of rf and dc self-bias voltages with...

On the scaling of rf and dc self-bias voltages with pressure in electronegative capacitively coupled plasmas

Agarwal, Ankur, Dorf, Leonid, Rauf, Shahid, Collins, Ken
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3676182
File:
PDF, 4.98 MB
english, 2012
Conversion to is in progress
Conversion to is failed