Microhollow cathode discharge excimer lamps
Schoenbach, Karl H., El-Habachi, Ahmed, Moselhy, Mohamed M., Shi, Wenhui, Stark, Robert H.Volume:
7
Year:
2000
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.874039
File:
PDF, 509 KB
english, 2000