Control of ion bombardment energy in the low-temperature...

Control of ion bombardment energy in the low-temperature deposition of highly transparent and conducting In2O3 and ZnO thin films by activated reactive evaporation

Lau, W. S.
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575230
Date:
May, 1988
File:
PDF, 695 KB
english, 1988
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