13 nm high-efficiency nickel-germanium soft x-ray zone...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 1

13 nm high-efficiency nickel-germanium soft x-ray zone plates

Reinspach, Julia, Lindblom, Magnus, Bertilson, Michael, von Hofsten, Olov, Hertz, Hans M., Holmberg, Anders
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3520457
File:
PDF, 650 KB
english, 2011
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