Transition behavior of surface morphology evolution of...

Journal of Applied Physics 2008 Vol. 103; Iss. 3

Transition behavior of surface morphology evolution of Si(100) during low-energy normal-incidence Ar[sup +] ion bombardment

Ozaydin, Gozde, Ludwig, Karl F., Zhou, Hua, Zhou, Lan, Headrick, Randall L.
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Volume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2837101
File:
PDF, 750 KB
english, 2008
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