Growth of diamond thin films by spiral hollow cathode...

Journal of Applied Physics 1989 Vol. 66; Iss. 10

Growth of diamond thin films by spiral hollow cathode plasma-assisted chemical vapor deposition

Kung, P. J., Tzeng, Y.
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Volume:
66
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343824
File:
PDF, 1.49 MB
english, 1989
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