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Rotary reactor for atomic layer deposition on large quantities of nanoparticles
McCormick, J. A., Cloutier, B. L., Weimer, A. W., George, S. M.Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2393299
File:
PDF, 531 KB
english, 2007