Rotary reactor for atomic layer deposition on large...

Rotary reactor for atomic layer deposition on large quantities of nanoparticles

McCormick, J. A., Cloutier, B. L., Weimer, A. W., George, S. M.
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Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2393299
File:
PDF, 531 KB
english, 2007
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