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[IEEE 2011 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Osaka, Japan (2011.09.8-2011.09.10)] 2011 International Conference on Simulation of Semiconductor Processes and Devices - Exploring MOL design options for a 20nm CMOS technology using TCAD
Scholze, Andreas, Furkay, Stephen, Kim, Seong-Dong, Jain, SameerYear:
2011
Language:
english
DOI:
10.1109/sispad.2011.6035059
File:
PDF, 596 KB
english, 2011