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Irradiation enhanced diffusion of boron in delta-doped silicon
Lévêque, P., Kuznetsov, A. Yu., Christensen, J. S., Svensson, B. G., Larsen, A. NylandstedVolume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1363685
File:
PDF, 361 KB
english, 2001