Low temperature atomic layer deposited ZnO photo thin film...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 01 Vol. 33; Iss. 1

Low temperature atomic layer deposited ZnO photo thin film transistors

Oruc, Feyza B., Aygun, Levent E., Donmez, Inci, Biyikli, Necmi, Okyay, Ali K., Yu, Hyun Yong
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4892939
Date:
January, 2015
File:
PDF, 1.69 MB
english, 2015
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