Thin film analysis by low-energy ion scattering by use of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 01 Vol. 33; Iss. 1

Thin film analysis by low-energy ion scattering by use of TRBS simulations

Brüner, Philipp, Grehl, Thomas, Brongersma, Hidde, Detlefs, Blanka, Nolot, Emmanuel, Grampeix, Helen, Steinbauer, Erich, Bauer, Peter
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4901451
Date:
January, 2015
File:
PDF, 1.33 MB
english, 2015
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