Ultrathin oxide interfaces on 6H–SiC formed by plasma hydrogenation: Ultra shallow depth profile study
Xie, Xianning, Loh, Kian PingVolume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1509100
File:
PDF, 485 KB
english, 2002