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Scrubbing characteristics of CCl4 and C2F6 with a titanium sublimation trap
Hu, Yao-ZhiVolume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575684
Date:
May, 1988
File:
PDF, 541 KB
english, 1988