![](/img/cover-not-exists.png)
[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - A Highly-Sensitive Differential-Mode Microchemical Sensor Using TFBARs with On-Chip Microheater for Volatile Organic Compound (VOC) Detection
Heon-Min Lee,, Hong-Teuk Kim,, Hyung-Kyu Choi,, Hee-Chul Lee,, Hyung-Ki Hong,, Don-Hee Lee,, Joung-Uk Bu,, Euisik Yoon,Year:
2006
Language:
english
DOI:
10.1109/memsys.2006.1627843
File:
PDF, 542 KB
english, 2006