Thin-film deposition using low-energy ion beams (2) Pb+...

Thin-film deposition using low-energy ion beams (2) Pb+ ion-beam deposition and analysis of deposits

Amano, J.
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Volume:
14
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.569184
Date:
March, 1977
File:
PDF, 2.52 MB
english, 1977
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