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Hydrogenation of defects in edge-defined film-fed grown aluminum-enhanced plasma enhanced chemical vapor deposited silicon nitride multicrystalline silicon
Jeong, Ji-Weon, Rosenblum, Mark D., Kalejs, Juris P., Rohatgi, AjeetVolume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.373427
File:
PDF, 527 KB
english, 2000