Deposition of novel nanocomposite films by a newly...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2012 Vol. 30; Iss. 1

Deposition of novel nanocomposite films by a newly developed differential pumping co-sputtering system

Nose, Masateru, Kurimoto, Takeshi, Saiki, Atsushi, Matsuda, Kenji, Terayama, Kiyoshi
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3659704
File:
PDF, 1.33 MB
english, 2012
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