Low temperature solid phase crystallization of amorphous silicon at 380 °C
Yoon, Soo Young, Oh, Jae Young, Kim, Chae Ok, Jang, JinVolume:
84
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.368887
File:
PDF, 438 KB
english, 1998