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High-power pulsed sputtering using a magnetron with enhanced plasma confinement
Vlček, Jaroslav, Kudláček, Pavel, Burcalová, Kristýna, Musil, JindřichVolume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2388954
File:
PDF, 399 KB
english, 2007