The application of the barrier-type anodic oxidation method...

Review of Scientific Instruments 2014 / 09 Vol. 85; Iss. 9

The application of the barrier-type anodic oxidation method to thickness testing of aluminum films

Chen, Jianwen, Yao, Manwen, Xiao, Ruihua, Yang, Pengfei, Hu, Baofu, Yao, Xi
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4894525
Date:
September, 2014
File:
PDF, 612 KB
english, 2014
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