[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Nonlinear vibration in resonant silicon bridge pressure sensor: Theory and experiment
Li, Qingfeng, Fan, Shangchun, Tang, Zhangyang, Xing, WeiweiYear:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969188
File:
PDF, 609 KB
english, 2011