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[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - Effect of crystal-originated particles (COPs) on ULSI process integrity
Po-Ying Chen,, Chen, S. L., Tsai, M. H., Jing, M. H., Lin, T.-C., Wen-Kuan Yeh,Year:
2008
Language:
english
DOI:
10.1109/relphy.2008.4559001
File:
PDF, 1.32 MB
english, 2008