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Swift heavy-ion-induced epitaxial crystallization of buried Si[sub 3]N[sub 4] layer
Som, T., Satpati, B., Sinha, O. P., Kanjilal, D.Volume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1949275
File:
PDF, 657 KB
english, 2005