![](/img/cover-not-exists.png)
Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
Alevli, Mustafa, Ozgit, Cagla, Donmez, Inci, Biyikli, NecmiVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3687937
File:
PDF, 1.27 MB
english, 2012