Simulation of the production of atomic hydrogen in a...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2001 Vol. 19; Iss. 4

Simulation of the production of atomic hydrogen in a low-pressure-arc-discharge-based source

Kagadei, V. A., Kozyrev, A. V., Proskurovsky, D. I., Osipov, I. V.
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1349724
File:
PDF, 374 KB
english, 2001
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