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[IEEE 2007 IEEE Pulsed Power Plasma Science Conference - Albuquerque, NM, USA (2007.06.17-2007.04.22)] 2007 IEEE Pulsed Power Plasma Science Conference - Numerical Calculations on the Low Pressure Behavior of a High Density Plasma CVD Reactor
Bhoj, Ananth, Kinder, Ron, Gochberg, LarryYear:
2007
Language:
english
DOI:
10.1109/ppps.2007.4345874
File:
PDF, 47 KB
english, 2007