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[IEEE 40th Conference on Electronic Components and Technology - Las Vegas, NV, USA (20-23 May 1990)] 40th Conference Proceedings on Electronic Components and Technology - Damage in silicon caused by magnetron ion etching and its recovery effect

Hirai, M., Iwakuro, H., Ohno, J.-I., Kuroda, T.
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Year:
1990
Language:
english
DOI:
10.1109/ectc.1990.122263
File:
PDF, 383 KB
english, 1990
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