Development of a geometrical evaluation apparatus for...

Review of Scientific Instruments 2005 Vol. 76; Iss. 8

Development of a geometrical evaluation apparatus for ultrahigh 100 GB optical disk masters

Kuwahara, Masashi, Fons, Paul, Tominaga, Junji, Honma, Katsunori, Egawa, Akira, Miyatani, Tatsuya, Nakajima, Kunio, Abe, Hidekazu, Tokumoto, Hiroshi
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Volume:
76
Year:
2005
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1994921
File:
PDF, 651 KB
english, 2005
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