Effect of pulse frequency on the ion fluxes during pulsed dc magnetron sputtering
Rahamathunnisa, M., Cameron, D. C.Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3072513
File:
PDF, 694 KB
english, 2009