Direct measurement of CAs in group III+C coimplanted GaAs

Madok, J. H., Haegel, N. M., Moll, A., Haller, E. E., Yu, K. M.

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Volume:

Year:

1994

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.356061

File:

PDF, 1017 KB

english, 1994

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