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New long trace profiler based on phase plate diffraction for optical metrology of SSRF
Zeng, Danhua, Xiao, Tiqiao, Du, Guohao, Wen, Li, Luo, Hongxin, Xia, Shaojian, Xu, HongjieVolume:
77
Year:
2006
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2186253
File:
PDF, 471 KB
english, 2006